| 摘要 |
With three-dimensional detecting method and a three-dimensional detecting apparatus, it is possible to accurately detect a surface shape of a sample. While moving a sample, confocal images Fj (where j = 1, 2, ..., n) are taken at a plurality of heights which are different from each other in the direction of height. Based on the confocal images Fj, peak height positions P (x, y, L) at which the quantity of light becomes local maximum in the direction of height are found for each pixel (x, y). Further, for each pixel (x, y), a peak height position P (x, y, 0) which is highest among the peak height positions P (x, y, L) is selected as surface information regarding the sample corresponding to the pixel (x, y). <IMAGE> |
