| 摘要 |
PROBLEM TO BE SOLVED: To reduce the influences of vibrations generated outside in an atomic force microscope used on a stage of an optical microscope, by setting a plurality of piezoelectric driving members having one ends fixed to a supporting body. SOLUTION: An X-direction piezoelectric driving member 100 and a Y- direction piezoelectric driving member 101 are fixed at right angles to a main body 10 of an atomic force microscope via a block and a hinge. Moreover, a Z-direction piezoelectric driving member 102 is fixed to the block at right angles with respect to the driving members 100 and 101. A cantilever 20 is fixed to a free end of the Z-direction piezoelectric driving member 102. A probe set at the cantilever 20 can be moved to an optional position by optionally driving the X- and Y-direction piezoelectric driving members 100 and 101. A distance between the probe and a sample is maintained constant at all times at the scanning time of the probe by driving the Z-direction piezoelectric driving member 102.
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