| 摘要 |
<p>PROBLEM TO BE SOLVED: To detect the precise position deviation of ball by displaying X and Y pulses on X-axis and Y-axis displays, rotating the ball so as to keep the count value of any counter between respective counters at '0', linearly rotating and moving this ball in the X-axis or Y-axis direction. SOLUTION: X-axis and Y-axis detectors 4 and 5 orthogonally arranged while making detection axial directions mutually different at 90 deg. are provided at the positions near a ball 3. The respective outputs provided from these respective detectors 4 and 5 are converted to pulses by an X/Y pulse generating part 6 and afterwards, an X pulse 4A and a Y pulse 5A are outputted. Then, these respective pulses 4A and 5A are displayed through X-axis and Y-axis counters 8 and 9 onto X-axis and Y-axis displays 10 and 11, the ball 3 is rotated so as to keep the count value of any counter between the respective counters 8 and 9 at '0', and that ball 3 is linearly rotated and moved in the X-axis or Y-axis direction. Therefore, the fine position deviation of ball 3 can be detected.</p> |
