| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to maintain the surface for contact with a substrate at high cleanliness and to fully automatically stick a pellicle to one surface of the substrate by holding and press bonding the pellicle and a frame having no tacky adhesive to the surface of the side not stuck with the frame with the pellicle. SOLUTION: This automatic pellicle sticking device transports a dummy frame 24 and a tray to a case opening/closing section and puts an upper cap on this dummy frame 24 to provide protection. The substrate 3 is pressed by a press bonding block via a frame adapter 30 and the dummy frame 24, by which the adhesion of dust at the time of a sticking operation is effectively averted. The dummy frame 24 is returned to a case stock section every time the frame 23 with the circular pellicle is stuck once to the substrate 3, by which the removing and cleaning of the dummy frame 24 are made possible and the dummy frame 24 is maintained always in the state of the high cleanliness. |
