| 摘要 |
PROBLEM TO BE SOLVED: To provide a spraying torch for forming stable and uniform spraying particles and able to realize a high-quality film having at high efficiency, by supplying a wire material of a spraying material into plasma jet from a hole of a hollow cathode whose inner surface is electronically insulated. SOLUTION: Plasma arc is generated between a water cooled anode nozzle 21 made of Cu and a hollow cathode 22 made of W-alloy, in which an insulating layer 22a made of SiC is provided. Plasma operating gas of Ar to be introduced from a supplying port 23 is made into plasma in a plasma generating camber 24, stabilized by an electromagnetic coil 26 arranged outside, and injected as Plasma jet from an anode nozzle port 25. A spraying material wire material 27 made of Ni-Cr alloy is supplied into plasma jet from the hollow cathode 22. Therefore, stable spraying particles are formed in plasma jet, spraying is performed by the uniform flying behavior, and a homogeneous splaying film having high density is formed. |
