| 摘要 |
PROBLEM TO BE SOLVED: To ensure highly accurate high resolution three-dimensional measurement even when the reflectance of object is uneven and to realize high degree of freedom in the setting of measuring distance. SOLUTION: The three-dimensional measuring equipment comprises means for scanning an object Q optically by projecting a detection light U, and an image pickup means for receiving the detection light U reflected on the object Q. While varying the irradiating directionθa of detection light U toward the object Q, quantity of detection light U incident to a specified light receiving region (g) on an image pickup plane S2 is sampled periodically. Based on three or more sampling values, including a maximum sampling value and immediately preceding and following sampling values, an irradiation timing Npeak for maximizing the quantity of light is determined by interpolation. Subsequently, a part (ag) corresponding to the light receiving region (g) on the object Q is located based on the irradiating direction at that irradiation timing and the relationship between the light receiving region (g) and the incident direction of detection light.
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