Positiv arbeitende Fotoresistzusammensetzung,申请号DE19956000160T-传众专利搜索

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发明名称	Positiv arbeitende Fotoresistzusammensetzung
摘要
申请公布号	DE69500160(T2)	申请公布日期	1997.06.05
申请号	DE19956000160T	申请日期	1995.03.16
申请人	FUJI PHOTO FILM CO., LTD., MINAMI-ASHIGARA, KANAGAWA, JP	发明人	KAWABE, YASUMASA, C/O FUJI PHOTO FILM CO., LTD., HAIBARA-GUN, SHIZUOKA, JP;SATO, KENICHIRO, C/O FUJI PHOTO FILM CO.,LTD., HAIBARA-GUN, SHIZUOKA, JP;AOAI, TOSHIAKI, C/O FUJI PHOTO FILM CO., LTD., HAIBARA-GUN, SHIZUOKA, JP;UENISHI, KAZUYA, C/O FUJI PHOTO FILM CO., LTD., HAIBARA-GUN, SHIZUOKA, JP
分类号	G03F7/022;G03F7/039;H01L21/027;(IPC1-7):G03F7/022	主分类号	G03F7/022
代理机构		代理人
主权项
地址

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