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发明名称
Substrate structure for composite semiconductor device
摘要
申请公布号
EP0323856(B1)
申请公布日期
1997.06.04
申请号
EP19890100183
申请日期
1989.01.05
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
KITAHARA, KOICHI;NATSUME, YOSHINORI;HOSOKI, YOSHINORI
分类号
H01L27/06;H01L21/762;H01L21/8249;(IPC1-7):H01L21/76
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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