发明名称 |
Efficient generation of fill shapes for chips and packages |
摘要 |
An efficient method for modifying a chip or package design allows for the creation of small shapes without excessive expansion of design data. A computer program takes a physical design, represented in a computer data file, and generates a modified version of the design in which fill shapes have been added. Subsequently, when the modified design is processed, the resulting semiconductor chip or package will contain physical images of the added fill shapes, with the effect of making local pattern density more uniform and hence reducing process-induced variations in feature size and shape.
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申请公布号 |
US5636133(A) |
申请公布日期 |
1997.06.03 |
申请号 |
US19950445447 |
申请日期 |
1995.05.19 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHESEBRO, DONALD G.;KIM, YOUNG O.;LAVIN, MARK A.;MAYNARD, DANIEL N. |
分类号 |
G06F17/50;(IPC1-7):G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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