| 摘要 |
PROBLEM TO BE SOLVED: To precisely grip a micro thin piece part. SOLUTION: When two gripping members in jigs 2a are closed together, a micro optical filter 1 can be gripped. An oscillators 3 installed in the jig 2a is vibrated at a vibration frequency of 2kHz and a vibration amplitude of 3μm, for example. Although the filter 1 is apt to stop on the tilting part in the jig 2a because of charge in the filter 1 or friction between the filter 1 and the jig 2a, the filter 1 is dropped to the lower end of the jig 2a, for the jig 2a is oscillated by means of the oscillator 3. In this way, the position and the posture of the filter 1 to the jig 2a can be precisely decided, so that the filter 1 can be gripped in a desired position.
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