PELLICLE HOUSING CONTAINER

摘要

PROBLEM TO BE SOLVED: To obtain a dustproof case which may be handled with a transporting arm by providing the outer bottom of a main body with ribs engaging with transporting means for transporting only the frame case or the main body. SOLUTION: The frame case is composed of a tray part 14 to be placed with a frame 16 with a pellicle and a cap part 15 for closing this tray part 14 from above. The rear surface of the tray part 14 is provided with the two parallel ribs 14b. These ribs 14b are disposed for the purpose of handling at the time of automatically transporting the frame case into the main body of a mounting device. As a result, the sure handling of the housing case housing the frame 16 with the pellicle is made possible. Then, the housing case is handled without manual labor in the prescribed position of an automatic pellicle sticking device kept at adequate cleanliness at the time of sticking the pellicle.