PLASMA CVD METHOD,申请号JP19950317524-传众专利搜索

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发明名称	PLASMA CVD METHOD
摘要
申请公布号	JPH09139381(A)	申请公布日期	1997.05.27
申请号	JP19950317524	申请日期	1995.11.10
申请人	SEMICONDUCTOR ENERGY LAB CO LTD	发明人	YAMAZAKI SHUNPEI;SAKAMA MITSUNORI;HIROKI MASAAKI
分类号	C23C16/50;C23C16/40;H01L21/205;H01L21/285;H01L21/31;H01L21/316;H01L29/786;(IPC1-7):H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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