发明名称 |
TFT substrate having scanning lines of metal films of columnar crystal grains |
摘要 |
A liquid crystal display comprises a lower substrate provided with a plurality of scanning signal lines, a plurality of image signal lines perpendicularly intersecting the scanning signal lines, a plurality of thin-film transistors formed at the intersection points of the scanning signal lines and the image signal lines, and a plurality of pixel electrodes connected respectively to the thin-film transistors; an upper substrate disposed opposite to the lower substrate and provided with a common electrode opposite to the pixel electrodes; and liquid crystal layer sealed in a space formed between the lower and the upper substrate. Each of the scanning signal lines is formed so as to form the gate electrode of a corresponding thin-film transistor, the scanning signal lines are formed by processing a metal film of columnar crystal grains, and the surface of the metal film is coated with a self-aligned oxide film.
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申请公布号 |
US5633738(A) |
申请公布日期 |
1997.05.27 |
申请号 |
US19950450127 |
申请日期 |
1995.05.25 |
申请人 |
HITACHI, LTD. |
发明人 |
WAKUI, YOKO;KONISHI, NOBUTAKE |
分类号 |
G02F1/136;G02F1/1362;G02F1/1368;H01L21/28;H01L29/40;H01L29/43;H01L29/78;H01L29/786;(IPC1-7):G02F1/136;H01L29/04 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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