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发明名称
Cleaning process
摘要
申请公布号
EP0616051(B1)
申请公布日期
1997.05.21
申请号
EP19940103219
申请日期
1994.03.03
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
KOKEMUELLER, DETLEF
分类号
C23G1/16;C02F5/00;C02F5/08;C02F5/10;C02F5/12;C23G1/14;C23G1/20;C23G1/24;G21F9/00;(IPC1-7):C23G1/14
主分类号
C23G1/16
代理机构
代理人
主权项
地址
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