发明名称 |
Semi-conductor integrated circuits |
摘要 |
A fuse link 16 is formed of a portion of a top level of patterned metal conductor in a multilevel conductor integrated circuit 10. A deposited layer of oxide material 26 covers the fuse link. Radiant energy from such as a laser 36 is directed through the oxide material 26 to heat and open the fuse link 16. Layers of deposited protective oxide 28 and PIX 30 then cover the fuse link and layer of oxide material. One photoprocessing step is avoided by locating the fuse link 16 and bond pad 22, both made from the top layer of conductive material, at different levels. The blanket etch then exposes the bond pad 22 while leaving the fuse link 16 covered. The fuse link can be formed down in a step 38 or the bond pad 22 can be formed above such as a group of memory cells 80. The bond pad 22 and fuse link 16 also can be formed at the same level with other process procedures. <IMAGE> |
申请公布号 |
EP0735583(A3) |
申请公布日期 |
1997.05.21 |
申请号 |
EP19960302137 |
申请日期 |
1996.03.27 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
FUKUHARA, HIDEYUKI;ASHIGAKI, SHIGEO |
分类号 |
H01L21/82;H01L23/525;(IPC1-7):H01L23/525 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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