| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase a resolution without varying the magnification of an image by specifying the constitution of a 2nd light convergence disk arranged between a fine aperture and an objective. SOLUTION: This scanner is equipped with the 2nd light convergence disk 40 which have microlenses ML2 formed in the same pattern as the arrangement of fine apertures of a pinhole disk 111. Then incident light is stopped down to a pinhole of the pinhole disk 111 by a microlens ML1 of a 1st light convergence disk 112 and the light which is passed through the pinhole is imaged by a microlens ML2 of the 2nd light convergence disk 40 at a focus position (intermediate image plane) behind the objective 20. In this case, the microlens ML2 serves as a relay system which equalizes the numerical aperture(NA) of the microlens ML1 to the rear-side NA of the objective 20. The incident light is converged on a sample 30 with the NA of the objective 20. Return light from the sample passes through the same optical path and is stopped down right to the diameter of the pinhole pH on an in-focus plane to enter the pinhole.</p> |
