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发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH09134696(A)
申请公布日期
1997.05.20
申请号
JP19950293027
申请日期
1995.11.10
申请人
HITACHI LTD;HITACHI INSTR ENG CO LTD
发明人
NAKAGAWA MINE;UENO TAKEO
分类号
H01J37/244;(IPC1-7):H01J37/244
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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