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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09134918(A)
申请公布日期
1997.05.20
申请号
JP19950292511
申请日期
1995.11.10
申请人
FUJITSU LTD
发明人
ITO NOBORU
分类号
H01L21/3205;H01L21/316;H01L21/324;H01L23/52;(IPC1-7):H01L21/316;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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