POSITIONING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce the vibration, and shorten the settling time for positioning by loading a positioning. mechanism to position a body to be driven on a frame through a damping rubber plate having impact and vibration absorption. SOLUTION: A scale 10 for position detection to detect the position of an XY stage 1 in the Y-axis direction along a guide 3 for an upper shaft is provided, and a scale 11 for position detection to detect the position of the XY stage 1 in the X-axis direction along a guide 4 for a lower shaft is provided. A sufficiently heavy block 5 capable of sufficiently resisting the turbulence such as inertia force generated by acceleration/deceleration of the XY-table 1 is supported and fixed horizontal at three points on a rectangular top plate 30. A damping rubber plate 31 having impact and vibration absorption of e.g. 120mm×120mm×10mm in size is interposed between the top plate 30 and an upper plate 12a at the position corresponding to four corner parts of the rectangular top plate 30.