| 摘要 |
<p>PROBLEM TO BE SOLVED: To control the dislocation of a sample in the normal-line direction and the tangent- line direction of a sample holding face by a method wherein the sample is brought into contact with a sample guide so as to be held by the Bernoulli effect which is generated between the sample and the sample holding face. SOLUTION: A sample guide plate 9 on which a sample 1 is set in placed on a lower holding implement 4, solenoid valves 21-1, 21-2, 21-3 for an inert gas cylinder 20 are opened, an inert gas is jetted at a prescribed flow rate, the sample guide plate 9 is levitated from the lower holding implement 4, and the sample 1 is brought into contact with the lower holding implement 4 by the Bernoulli effect so as to be held. In addition, an upper holding implement 6 is set at a prescribed distance at the upper part of the sample 1, solenoid valves 21-4, 21-5 are opened, an inert gas is jetted at a prescribed flow rate, the Bernoulli effect is generated between the sample 1 and the upper holding implement 6, the upper holding implement 6 is retreated to the upper part when the rotation of the sample guide plate 9 is stopped, and the treated sample 1 is taken out. Consequently, the dislocation of the sample 1 in the normal-line direction and the tangent-line direction of a sample holding face can be suppressed.</p> |
