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发明名称
SUBSTRATE EXPOSURE SYSTEM
摘要
申请公布号
JPH09129548(A)
申请公布日期
1997.05.16
申请号
JP19950308523
申请日期
1995.11.02
申请人
HITACHI ELECTRON ENG CO LTD
发明人
KOZUKA TOSHIYUKI;YOSHITAKE HIROSHI;KODAMA MASAYOSHI
分类号
G03F7/20;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
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