| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device capable of performing continuous monitoring and positioning of beam or jet flow, especially laser beam, and also correction to the basic position, easily and inexpensively. SOLUTION: Comparison is made between the preset value or the value or the detection result obtained from a first sensor 7 relating to the prescribed position of beam or jet flow and the value or the detection result obtained from a second sensor 9 relating the actual position of beam or jet flow 3. The comparison should be made in consideration of relative displacement depending on the speed of beam or jet flow to a workpiece, and in the case where there is difference between the actual position and the prescribed position, beam or jet flow 3 is corrected at the basic position. |
