| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an automatic wafer transfer/loading apparatus, wherein a plurality of the series of vacuum generating sources for sucking a wafer are provided, the wafer is sucked even if a part of the vacuum generating sources fails, a function for preventing the fall of the wafer during movement is provided and a vacuum generating device is made simple. SOLUTION: Even when one suction pad 2 is deviated from a wafer 1 and the suction cannot be continued and when one ejector vacuum pump 3 fails and the wafer 1 cannot be attracted, the wafer 1 is sucked with the remaining suction pads 2. Even if an air pressure circuit fails, the fall of the wafer 1 can be prevented since a pawl 5 is waiting directly beneath the wafer 1. The providing space of the apparatus is decreased with the ejector vacuum pump 3.</p> |
