SCATTERING PREVENTION OF LOW-MELTING MATERIAL, SHUTTER, AND RECOVERING DEVICE AND VAPOR DEPOSITION DEVICE FOR LOW-MELTING MATERIAL,申请号JP19950282722-传众专利搜索

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发明名称	SCATTERING PREVENTION OF LOW-MELTING MATERIAL, SHUTTER, AND RECOVERING DEVICE AND VAPOR DEPOSITION DEVICE FOR LOW-MELTING MATERIAL
摘要
申请公布号	JPH09124392(A)	申请公布日期	1997.05.13
申请号	JP19950282722	申请日期	1995.10.31
申请人	ANELVA CORP	发明人	MORIZAKI HITOSHI;YOKOYAMA SHUICHI
分类号	C30B23/02;C30B35/00;H01L21/203;H01L21/285;(IPC1-7):C30B23/02	主分类号	C30B23/02
代理机构		代理人
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