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发明名称
摘要
申请公布号	NL6410000(A)	申请公布日期	1965.03.01
申请号	NL19640010000	申请日期	1964.08.28
申请人		发明人
分类号	C23C16/40;C30B31/02;H01L21/00;H01L21/225;H01L21/316	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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