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发明名称
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要
申请公布号
JPH09115881(A)
申请公布日期
1997.05.02
申请号
JP19950267117
申请日期
1995.10.16
申请人
NEC CORP
发明人
MIZUTANI HIROSHI
分类号
H01L21/302;H01L21/306;H01L21/3065;H01L21/308;H01L21/338;H01L29/812;(IPC1-7):H01L21/306
主分类号
H01L21/302
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