SEMICONDUCTOR DEVICE AND ITS MANUFACTURE AND SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT,申请号JP19950275227-传众专利搜索

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发明名称	SEMICONDUCTOR DEVICE AND ITS MANUFACTURE AND SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT
摘要
申请公布号	JPH09116087(A)	申请公布日期	1997.05.02
申请号	JP19950275227	申请日期	1995.10.24
申请人	HITACHI LTD;HITACHI VLSI ENG CORP	发明人	MIURA TOMOYOSHI;NISHIZAWA HIROTAKA;OBARA TETSUJI;MORITA SADAO;ARAKI TAKASHI;GOTO MASAKATSU;KASAI NORIHIKO;FUDA MUTSUO;SEKI ISAO;TAKEURA SHINOBU
分类号	H01L23/50;H01L23/522;H01L23/538;(IPC1-7):H01L23/50	主分类号	H01L23/50
代理机构		代理人
主权项
地址

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