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发明名称
INSPECTION APPARATUS
摘要
申请公布号
JPH09113451(A)
申请公布日期
1997.05.02
申请号
JP19950267115
申请日期
1995.10.16
申请人
SEKI GIKEN KK
发明人
SEKI ATSUO
分类号
G01R31/06;G01N21/84;G01N21/88;G01N21/93;G01N21/95;G01N21/952;(IPC1-7):G01N21/84
主分类号
G01R31/06
代理机构
代理人
主权项
地址
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