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发明名称
SHAPE GENERATING DEVICE
摘要
申请公布号
JPH09115692(A)
申请公布日期
1997.05.02
申请号
JP19950265957
申请日期
1995.10.13
申请人
MORI YUZO;NIKON CORP
发明人
TAKINO HIDEO;MIZUKAMI HIROSHI;KOBAYASHI TERUNORI;ITO HIROSHI;SHIBATA NORIO
分类号
H05H1/46;C03C15/00;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H05H1/46;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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