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发明名称
CHARGED PARTICLE BEAM BLANKING APPARATUS IN CHARGED PARTICLE BEAM SYSTEM
摘要
申请公布号
JPH09115796(A)
申请公布日期
1997.05.02
申请号
JP19950266628
申请日期
1995.10.16
申请人
JEOL LTD
发明人
WAKIMOTO OSAMU
分类号
G03F7/20;H01J37/04;H01J37/147;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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