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发明名称
FORMATION OF DIELECTRIC FILM
摘要
申请公布号
JPH09115898(A)
申请公布日期
1997.05.02
申请号
JP19950273838
申请日期
1995.10.23
申请人
SONY CORP
发明人
HASEGAWA TOSHIAKI
分类号
H01L21/768;H01L21/31;H01L21/312;H01L23/522;(IPC1-7):H01L21/312
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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