| 发明名称 |
APPARATUS FOR AFFIXING A ROTATING CYLINDRICAL MAGNETRON TARGET TO A SPINDLE |
| 摘要 |
An apparatus to releasably affix a rotating cylindrical magnetron target (10) to a spindle (20) utilizes a threaded spindle collar (30) engaging threads (70) on the outside surface of the target (10), with a single water-to-vacuum seal (40) located at the target and spindle interface. The threads (70) may be removable from the target, enabling efficient assembly/disassembly and recycling.
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| 申请公布号 |
CA2235864(A1) |
申请公布日期 |
1997.05.01 |
| 申请号 |
CA19962235864 |
申请日期 |
1996.10.28 |
| 申请人 |
VANDERSTRAETEN E. BVBA |
发明人 |
GOBIN, GUY;MORGAN, STEVEN;VANDERSTRAETEN, JOHAN;VANDERSTRAETEN, ERWIN |
| 分类号 |
C23C14/35;C23C14/34;H01J37/34;(IPC1-7):C23C14/35 |
主分类号 |
C23C14/35 |
| 代理机构 |
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