摘要 |
The invention is directed to a probe head of the measuring type equipped with measuring force generators (15 to 17) for the generation of measuring forces of pregiven magnitude and direction. The probe head further includes a system for arresting or clamping the displaceable part 10 of the probe head in preselectable directions. The measuring force generators are arranged directly on the displaceable parts (4, 9, 10) of the guide units for the different deflection directions (x, y, z). The arresting or clamping system is implemented in the form of an electronic control circuit which applies a signal to the force generators (15 to 17) which is opposite to the deflection of the displaceable part 10. In addition, the probe head includes a system for damping the displaceable part. This damping system operates also on an electromagnetic basis with the aid of the measuring force generators configured as plunger coils.
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