| 摘要 |
An ablation apparatus for ablating by laser beam including a laser beam providing means for providing laser beam to ablate an object to be processed into a desired form, a light beam delivering optical system for delivering the laser beam to the object to be processed, an ablation area changing diaphragm for changing ablation area on the object to be processed, and a control device for controlling the motion of the ablation area changing diaphragm, the ablation apparatus comprising instructing device for instructing the controlling device to form a curved surface with a first optical characteristic on the rate reference object which has a known ablation rate as to an ablation rate of the object to be processed, measuring device for measuring a second optical characteristic of the curved surface actually formed on a rate reference object in accordance with control by the controlling device, input device for inputting the second optical characteristic measured by the measuring device, and correcting device for calculating an ablation rate with respect to the object to be processed based on a comparison between the second optical characteristic input by the input device and the first optical characteristic whereby a driving information of the ablation apparatus is corrected.
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