发明名称 |
Interferometric method for optically testing an object with an aspherical surface |
摘要 |
A method for testing an object with an aspherical surface. Based on the theory that an aspherical surface is composed of a plurality of spherical surfaces with different radii, the method tests the profile of said aspherical object by positioning the focus of an interferometer on the curvature centers of the plurality of spherical surfaces, recording the relative displacement of the aspherical object and the referenced spherical surfaces and calculating the aberrations therebetween.
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申请公布号 |
US5625454(A) |
申请公布日期 |
1997.04.29 |
申请号 |
US19950449393 |
申请日期 |
1995.05.24 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
HUANG, JUNE-JEI;LIN, CHIE-CHING |
分类号 |
G01B11/255;G01M11/02;(IPC1-7):G01B9/02 |
主分类号 |
G01B11/255 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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