发明名称 Interferometric method for optically testing an object with an aspherical surface
摘要 A method for testing an object with an aspherical surface. Based on the theory that an aspherical surface is composed of a plurality of spherical surfaces with different radii, the method tests the profile of said aspherical object by positioning the focus of an interferometer on the curvature centers of the plurality of spherical surfaces, recording the relative displacement of the aspherical object and the referenced spherical surfaces and calculating the aberrations therebetween.
申请公布号 US5625454(A) 申请公布日期 1997.04.29
申请号 US19950449393 申请日期 1995.05.24
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE 发明人 HUANG, JUNE-JEI;LIN, CHIE-CHING
分类号 G01B11/255;G01M11/02;(IPC1-7):G01B9/02 主分类号 G01B11/255
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