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发明名称
Verfahren zum Beseitigen von Kristallfehlern in Siliziumscheiben
摘要
申请公布号
DE19538983(A1)
申请公布日期
1997.04.24
申请号
DE19951038983
申请日期
1995.10.19
申请人
SIEMENS AG, 80333 MUENCHEN, DE
发明人
SCHULZE, HANS-JOACHIM, DR., 85521 OTTOBRUNN, DE
分类号
C30B31/06;C30B33/00;H01L21/22;H01L21/322;H01L21/324;(IPC1-7):C30B31/06;H01L21/223
主分类号
C30B31/06
代理机构
代理人
主权项
地址
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