Interferometer comprising an integrated arrangement and a reflecting part which are separated from each other by a measurement zone,申请号EP19930116051-传众专利搜索

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发明名称	Interferometer comprising an integrated arrangement and a reflecting part which are separated from each other by a measurement zone
摘要
申请公布号	EP0591911(B1)	申请公布日期	1997.04.23
申请号	EP19930116051	申请日期	1993.10.05
申请人	CSEM, CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE S.A.	发明人	VOIRIN, GUY;FALCO, LUCIEN
分类号	G01B9/02;G01N21/45;(IPC1-7):G01J9/02	主分类号	G01B9/02
代理机构		代理人
主权项
地址

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