| 摘要 |
PURPOSE:To accurately measure bonding strength, by providing a pressure element, an AE sensor and a load cell. CONSTITUTION:When a specimen 1 is set to a support shaft and a motor 9 is driven, a substrate is bent by a pressure element 6. At this time, the signals of all of a displacement converter 10, an AE sensor 2 and a load cell 5 are taken in a personal computer at every certain interval. Then, bending quantity is increased until a film is released and, after the release of the film is sufficiently generated, the rotation of the motor 9 is stopped. From the taken-in data, the correlation of bending quantity, load, the amplitude strength of acoustic emission and a count number is calculated. By this method, no excessive force is applied to the film and bonding strength can be accurately measured even with respect to a flexible substrate or a specimen low in bonding strength. |
