发明名称 |
Foreign particle inspection apparatus |
摘要 |
A foreign particle inspection apparatus, for detecting a foreign particle on a reticle or the like includes an illumination system for irradiating an inspection area on a specimen with inspecting light, and plural light-receiving systems adapted to condense the scattered light from a foreign particle in the inspection area and having respective light-receiving areas on the specimen, each smaller than the inspection area. Each of the light-receiving areas of the plural light-receiving systems overlaps partially with at least one of the other light-receiving areas. The plural light-receiving systems are so arranged that any point in the inspection area is covered by the light-receiving areas of at least two of the plural light-receiving systems. A foreign particle in the inspection area is detected by a detection system, based on the lights condensed by the plural light receiving systems.
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申请公布号 |
US5623340(A) |
申请公布日期 |
1997.04.22 |
申请号 |
US19950391602 |
申请日期 |
1995.02.21 |
申请人 |
NIKON CORPORATION |
发明人 |
YAMAMOTO, KENJI;HAYANO, FUMINORI;HAGIWARA, TSUNEYUKI;TASHIRO, HIDEYUKI |
分类号 |
G01N21/88;G01N21/94;G01N21/956;G06T1/00;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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