发明名称 POLISHING SURFACE PLATE
摘要 PROBLEM TO BE SOLVED: To provide a polishing surface plate which shows desirable characteristics as to variation in flatness of the polishing surface plate itself, life, and amount of wear and has an excellent effect of avoiding flawing of the surface of a member to be polished. SOLUTION: A polishing surface plate is provided which is made from spheroidal graphite cast iron comprising spheroidal graphite with a graphite particle diameter of 100&mu;m or less, present in a dispersed state with the number of graphite particles being 70 pieces/mm<2> or more, in a base material having a Vickers hardness number of 200 or more.
申请公布号 JPH09103956(A) 申请公布日期 1997.04.22
申请号 JP19960152859 申请日期 1996.05.27
申请人 TOSHIBA CORP;TOSHIBA CERAMICS CO LTD 发明人 SHIKADA YUKIO;TOKORO HIROKAZU;NISHIMURA TAKANOBU;KINOSHITA MASAHARU;MASUDA NORIO
分类号 B24B37/12;B24B37/14 主分类号 B24B37/12
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