发明名称 |
Two-element semiconductor capacitive acceleration sensor |
摘要 |
This invention concerns a capacitive acceleration sensor complete with planar build-up, in particular for use as a component part of a vehicle occupant protection system within a motor vehicle. A self-supporting structure will be movably located within a hollow space between two semiconductor elements which are electrically insulated from each other but mechanically bonded, where an acceleration force acting on the inert mass of the self-supporting structure will cause a change in the distance between this self-supporting structure and the semiconductor element. This produces a change in capacity which can be evaluated by means of suitable circuitry.
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申请公布号 |
US5623099(A) |
申请公布日期 |
1997.04.22 |
申请号 |
US19950517436 |
申请日期 |
1995.08.21 |
申请人 |
TEMIC TELEFUNKEN MICROELECTRONIC GMBH |
发明人 |
SCHUSTER, GUENTHER;NOTHELFER, UDO |
分类号 |
G01P15/08;G01P15/125;H01L29/84;(IPC1-7):G01P15/125 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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