| 摘要 |
PROBLEM TO BE SOLVED: To improve the detecting accuracy by providing a predicted error generating means for temperature detection output, a predicted error delay means and a temperature detection output compensating means from a temperature sensor. SOLUTION: A temperature detector 3 detects the temperature of a material to be measured from the temperature detection output supplied from a thermocouple 1, and supplies it to a subtracter 6. An error generator 4 generates the predicted error voltage Ve of the error of the output of the thermocouple 1 due to the heat generation of a heater, and supplies it to an N-th delay filter 5. The filter 5 delays the voltage Ve supplied from the generator 4, and supplies it to a subtracter 6. The subtracter 6 obtains the difference between the voltage supplied from the detector 3 and the voltage Ve delayed by the filter 5, and outputs it as the detection temperature via an output terminal 7. Thus, the predicted error voltage is equivalently low immediately after a power source is turned on, and the predicted error voltage increases in response to the lapse of time from the energization of the power source, and hence the compensation adapted fro the output change of the detector 3 can be executed to make it possible to accurately measure the temperature. |
