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经营范围
发明名称
THIN FILM FORMING DEVICE
摘要
申请公布号
JPH09104968(A)
申请公布日期
1997.04.22
申请号
JP19950284468
申请日期
1995.10.04
申请人
NISSIN ELECTRIC CO LTD
发明人
MURAKAMI HIROSHI;SUZUKI YASUO;DOI AKIRA
分类号
C23C14/06;C23C14/24;C23C14/30;C23C14/56;(IPC1-7):C23C14/06
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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