Method and apparatus for measuring a magnetic field using a magnetic force microscope by magnetizing a probe and correcting a detected magnetic field

摘要

A magnetic force microscope for measuring a magnetic field near a surface of a magnetic sample includes a cantilever having a ferromagnetic probe at one end thereof and receiving a magnetic force from the surface of the magnetic sample. An oscillation device is fixed to another end of the cantilever for oscillating the cantilever. A voltage application device applies an alternating voltage to the oscillation device. A deflection detecting device detects the oscillation of the cantilever. A magnetic field generating device supplies a magnetic field near the ferromagnetic probe. By this construction, it is possible to correct fluctuations in magnetic field measurements using probes with different magnetic characteristics and magnetic field detecting sensitivity, and to measure an absolute value of the detected magnetic field. Further, since the ferromagnetic probe can be magnetized, it is possible to increase the magnetic sensitivity of the ferromagnetic probe.