Electron beam unit esp. for hardening or welding

摘要

In an electron beam unit consisting of one or more electron guns and several containers, evacuation units and current generating, control and monitoring devices, the novelty is that (a) a plate (3), which can move in one or more coordinate directions, is positioned vacuum-tightly on a transfer vacuum chamber (1) and supports an electron gun (4); (b) the plate (3) is designed and movable so the electron gun (4) can be positioned at each container (7, 7'); (c) the containers (7, 7') are arranged in a row in the plate movement direction at one (pref. the opposite) side of the transfer chamber (1); (d) each container (7, 7') is connected to the transfer chamber (1) by a vacuum valve (6) and is connected to an evacuation unit (8); (e) an evacuation unit (2) is connected to the transfer chamber (1); and (f) one side of the transfer chamber (1) is provided with a slit (9) allowing processing of the required regions in the containers with the electron beam (10).