发明名称 |
300MM MICROENVIRONMENT POD WITH DOOR ON SIDE |
摘要 |
A container for creating a microenvironment is disclosed. The container includes a shell (10), a door (90) and a plurality of supports (60) having a unique design which are used to securely retain items, such as silicon wafers (80), in a spaced apart parallel relationship. The supports are removable. An electrical path is provided to ground the supports. Kinematic coupling structures (44-46) are also provided for positioning the container on a surface so as to, for example, properly align the door with the port of a wafer processing tool.
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申请公布号 |
CA2218260(A1) |
申请公布日期 |
1997.04.17 |
申请号 |
CA19952218260 |
申请日期 |
1995.10.13 |
申请人 |
EMPAK, INC. |
发明人 |
WISEMAN, BRIAN;GALLAGHER, GARY;GREGERSON, BARRY |
分类号 |
B65D85/48;B65D;G11B33/04;G11B33/14;H01L21/673;H01L21/677;(IPC1-7):B65D85/86;H05F3/02;H01L21/68 |
主分类号 |
B65D85/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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