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发明名称
Detector array for use in interferomic metrology systems
摘要
申请公布号
EP0694764(A3)
申请公布日期
1997.04.16
申请号
EP19950104868
申请日期
1995.03.31
申请人
HEWLETT-PACKARD COMPANY
发明人
HERCHER, MICHAEL
分类号
G01B9/02;G01D5/38;(IPC1-7):G01D5/38
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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