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发明名称
SYSTEM ZUR ERZEUGUNG EINES PLASMAS MIT HOHER DICHTE
摘要
申请公布号
AT151569(T)
申请公布日期
1997.04.15
申请号
AT19920905727T
申请日期
1992.02.04
申请人
PLASMA & MATERIALS TECHNOLOGIES, INC.
发明人
CAMPBELL, GREGOR, A.;CONN, ROBERT, W.;PEARSON, DAVID, C.;CHARTS;DECHAMBRIER, ALEXIS, P.;SHOJI, TATSUO YOMEI
分类号
C23C14/34;C23C16/50;C23C16/511;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H05H1/46;(IPC1-7):H01J37/32
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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