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发明名称
ION SOURCE
摘要
申请公布号
JPH09102286(A)
申请公布日期
1997.04.15
申请号
JP19950257945
申请日期
1995.10.04
申请人
NISSIN ELECTRIC CO LTD
发明人
OKUDA SHOHEI
分类号
C23C14/35;C23C14/48;H01J27/18;H01J37/08;H01J37/317;(IPC1-7):H01J27/18
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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