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发明名称
Verfahren zur Herstellung einer Stufenlinse vom fresnelschen Typ
摘要
申请公布号
DE4314574(C2)
申请公布日期
1997.04.10
申请号
DE19934314574
申请日期
1993.04.29
申请人
LEICA LITHOGRAPHIE SYSTEME JENA GMBH, 07745 JENA, DE
发明人
KLEY, ERNST-BERNHARD DR., 07749 JENA, DE
分类号
G02B3/08;G03F7/00;G03F7/20
主分类号
G02B3/08
代理机构
代理人
主权项
地址
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